A close-up SEM image of a 3um thick silicon chip. The sample stage is tilted by 60 degrees in this picture. The actual thickness of the silicon is calculated as 3.75um*sin(60) = 3.2um.
Return to 1um Gold Beam Lead index
Return to ultra-thin Si index
Return to Research index
Return to SDMRG home
Last Updated July 25th, 2003 For comments or questions, contact RBass@virginia.edu