UVML - Materials and Protocol


The UVML has a number of dangerous chemicals and gases as well as a number of very sophisticated processing and analytical tools. We depend on everyone’s care and helpfulness in maintaining a safe and efficient laboratory. The UVML provides a limited number of chemicals, solvents and laboratory supplies. There is also a number of established protocols in the laboratory ranging from packing resists to waste labels- please make yourself aware and follow them. Users should also be aware that many of the etchants, resists and chemicals currently found in the laboratory have been ordered by different groups- the lab itself will not replace them. Items such as beakers, tweezers, scribing tools, timers and markers are the responsibility of the students to obtain, and hence your advisor’s ‘grants’ etc.


Solvents and Chemicals Supplied by the UVML

Chem List PDF

Resists, Developers and Strippers Supplied by the UVML

The UVML supplies the most commonly used resists: AZ4110, 4220, 4330, AZ5206E, AZ5214E, AZ-EBR (AZ-1500). The nLOF series of resists are currently under evaluation. The UVML also supplies the most commonly used developers: AZ400K (dilutions will be made up by the users as needed for your run), AZ300MIF, MIBK, MIBK/IPA(1:1/1:3). The UVML supplies the most commonly used resists strippers: AZ300T, NMP and Propylene Glycol. The Laboratory also provides different packing bottles for the resists.

Plating Solutions

The UVML does not provide any plating solutions.

Laboratory Supplies

Supply List PDF


Laboratory Start up & Shut down

These procedures are covered in both of the required Lab Tours. Briefly:
  • Start Up [first person in the lab] consists of (i) turning on the green-taped panel circuit breakers, (ii) turning on the house vacuum (controls in photolith), (iii) turning on the lights, (iv) turning on the red-marked fume hood panel breakers for the hotplates in photolith, (v) turning on the mask oven, (vi) turning on the mask cleaning hotplate, and (vii) opening the main DI valve for the mask cleaning station.
  • Shut Down [last person leaving the lab- check both cleanrooms to see if you are the last person in the cleanrooms] consists of (i) turning off all the fume hood panel breakers in the lab, (ii) turning off the mask oven, (iii) turning off the mask cleaning hotplate, (iv) closing the main DI valve for the mask cleaning station, (v) turning off the house vacuum (controls in photolith), (vi) THEN turn off the green-taped panel circuit breakers, (vii) turn off the lights, and (viii) remove your name-tag and all others from the sign-in board.

Equipment Usage

You are not permitted to use any of the processing tools (4 RIEs, 5 sputtering systems, 3 evaporators, 3 lithography aligners, 2 March O2 cleaners, PECVD, plating station, ellipsometer, 2 thickness profilers, optical profilometer, SEM, AFM, lapping tool, dicing tool) in the laboratory until you have been trained and approved by staff.

Resist - Lithography

The UVML only provides the 5,000 and 4,000 series resists (these are called UVML Resists). All other resist have been purchased by different groups and are their ‘property’. The (‘large’) purchased containers of resist are kept in the resist refrigerator outside photolithhography. The UVML resists are kept on a labeled drawer. ONLY STAFF SHOULD use these UVML bottles! Please note, any resist bottle taken from the refrigerator typically needs 30-60 minutes to warm to room temperature (bottles should not be opened until warm).

For the UVML resists, a set of 120ml General Use bottles are kept in lithography in a General Use red Akrobin centered on the shelf in the spinners hood. These are available for everyone to use. For the UVML resists, along the right side of the spinners hood, there are a set of 240ml Lab Packing bottles. These are to be used, if desired, to pack 30ml Individual User bottles for individual group use (if you don’t want to use the communal 120ml General use bottles). Don’t use these 240ml bottles to directly spin resist or to pack larger individual user bottles! There are also 60ml Individual User bottles which can be used by individuals to pack non-UVML resists. If you find that a 120ml General Use bottle or a 240ml Lab Packing bottle is getting low, please email staff.

Waste Labels

We have basically replicated the actual chemical waste cabinet layout with a virtual xls cabinet on the computer complete with hyperlinks to the actual dump files. We have also 'adjusted' many of the existing dump 'recipes' so that we don’t need, for examples, three dumps for different percentage variations of HCl+DI.

      To Print a WASTE LABEL:
1) The waste labels are printed on the same computer as before.
2) Click on the folder "UVML WASTE LABELS" on the desktop.
3) Open the Excel file "WASTE MASTER LAYOUT"
This file has three tabs on the bottom of the page: "Top Shelf, Middle Shelf, Bottom Shelf". THESE CORRESPOND to the three shelves in the CHEMICAL WASTE STORAGE CABINET where we store most of the chemical dumps! Each "shelf" has seven columns and four rows.
4) All of the chemical waste bottles that are presently in the chemical waste cabinet have a corresponding entry in this Excel File! In other words, if there is a waste bottle in the cabinet, then there is a waste label already listed in this excel file.
5) So, you want to print out a particular waste label. If the waste bottle is going to go into the Chemical Waste Cabinet, then look in this file for it:

--> If you find it, and the text is the color blue or red then the entry is a hyper-link to the actual label file. DOUBLE-CLICK on the entry. This will bring up the actual label file. Go ahead and follow the directions posted on the wall to check the printing settings. Please change the name to you (or your email address without the virginia.edu) and change the date. Print your label!

--> If you find it and the color is black then we could not find the actual label file so it is NOT a hyper-link. Since this is a waste dump you use (and perhaps you even made the original but didn't save it) YOU NEED TO MAKE UP A WASTE LABEL FOR IT. Make it and save it in an appropriate folder off the main desktop "UVML WASTE LABELS" folder. Now go to the Excel "WASTE MASTER LAYOUT" file and find the entry (which is not a hyper-link yet!). Right click (you need to be in the "normal view") and click on "Hyperlink". Navigate to the Excel waste file you just made and select it. You have now created a hyperlink which links the name of the waste-label to the Excel file for that waste label.

--> If you can't find the waste-label name "entry"in any of the three virtual 'shelves' then, EITHER it is a waste bottle that goes somewhere else (for example, 300T is kept under the mask hood, plating waste bottles are kept under the plating hood, developer waste bottles are kept in photolith etc) OR you will need to create a new waste label. If it does not go on a shelf in the waste-cabinet, then you need to search for the correct folder off the desktop folder "UVML WASTE LABELS". If it does go in the waste-cabinet, then make it and save it in the appropriate folder off the main desktop "UVML WASTE LABELS" folder. Determine a shelf and position for this dump. Write a very short descriptive term (eg, HF+Nitric+DI etch) for the dump in the corresponding position in the 'virtual' shelf. Right click (you need to be in the "normal view") and click on "Hyperlink". Navigate to the Excel waste file you just made and select it. You have now created a hyperlink which links the name of the waste-label to the Excel file for that waste label.

      IMPORTANT EXTRA NOTES: 1. We have gone in and adjusted a number of existing Waste Labels. There is no need to have a separate dump for solutions that have the same components, but with different solution strength. For example, instead of having one dump of 10%HCl+90&DI and another dump of 30%HCl+70%DI- I would make up one dump of say 1-50%HCl + remainder-DI. You can also consolidate dumps where you might be dumping in only one component of a solution (where safe). For example, in the lower shelf for strippers we have a dump of [0-100%NMP + 0-100%Proplyene Glycol]. You can dump 50:50 NMP:PropGlycol in this, but you can also dump in straight NMP! 2. On the top shelf, the third, fourth and fifth rows are DEDICATED TO SOLUTIONS THAT REQUIRE VENTED CAPS (and are noted in red on the sheet). All dumps that require vented caps should go on the top shelf in one of these rows! 3. You are not to add any dump bottles to the bottom shelf. It is reserved for solvents and resist strippers (except 300T which goes under the mask-cleaner hood). 4. When you do add a new dump to the cabinet, please also write in the dump name on the sheets that are posted inside the cabinet door. Staff will periodically update and reprint the sheets. They will also occasionally reposition/adjust the cabinet and listings.

Hot Plates

The white and blue hotplates with the white thermometers have a plug in the back for the thermometer. If the thermometer is not plugged in, the hot plate controls to the temperature of the hotplate surface. If the thermometer is plugged in, then the hotplate controls to the temperature of the thermometer. YOU MUST BE CAREFULL- for example, if the thermometer is plugged in, yet you do not have the white thermometer in a solution, the hotplate will heat to >300C and shut off after 5minutes.

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For comments or questions, contact awl1l@virginia.edu