A Collection of Patterns Fabriacted using Electron Beam Lithography:

SEM image of a Au pattern defined by uCP.

SEM image of a nanoscale pattern in PDMS (poly dimethyl siloxane, for uCP stamping)

SEM image of an FIB patterned nanoscale master mold for uCP

Return to Research Index

Return to SDMRG home

Last Updated May 10th, 2003
For comments or questions, contact jcs4x@virginia.edu