Michael L. Reed		Research Interests: Microsystems Microfabrication Nanotechnology
	Professor
	Email address:     reed [at] virginia.edu Home Page:     http://www.ee.virginia.edu/profile.php?ID=8 Phone:     (434) 924-6309 Fax:     (434) 924-8818 Office:     Thornton Hall - E216

Summary:

Professor Reed's research focuses on biomedical and electronic microsystems, and the development of microfabrication technologies. Example projects include: arrays of microprobes which can pierce tissues and inject drugs and genes into cells, including both research systems and clinical devices to prevent restenosis following balloon angioplasty; arrays of microbarbs which can pierce and latch to biologic tissues, for use as mechanical connectors in surgery; three-dimensional microstructure fabrication technologies based on anodic metal oxides; advanced integrated infrared sensors; sub-100-nm pattern transfer technology; scientific studies of anisotropic silicon etching.

Background:

Dr. Reed joined the University in 1997, after holding previous positions at Hewlett-Packard Laboratories, Carnegie-Mellon University, University of Twente, and ETH Zürich. He received B.S. and M.Eng. degrees from Rensselaer Polytechnic Institute, and the Ph.D. from Stanford University. He was the General Co-Chairman of the 1996 IEEE International MEMS Workshop, and is the North American Editor of the journal Sensors & Materials. He currently has 16 issued and pending patents related to microsystems technology and microfabricated medical devices. Dr. Reed is the recipient of the Hertz Prize and a Presidential Young Investigator Award, and is a Fellow of the Institute of Physics.

Research:

• Uncooled Infrared Detector Arrays with Electrostatically Levitated Sensing Elements, Defense Advanced Research Projects Agency
• Magnetic Proximity Microsensor Systems, Virginia Center for Innovative Technology/VisiTrak Sensors, Ltd.
• Nanoscale Templating of Biological Molecules, National Science Foundation/Virginia Center for Innovative Technology
• Control of Localized Epitaxy through Strain Engineering, National Science Foundation
• Fabrication of Panoramic Segmented Detector Arrays, NASA

Most Recent Publications:

• M. L. Reed, R. A. Rohrer, Applied Introductory Circuit Analysis for Electrical and Computer Engineers, Prentice-Hall, 1998.
• A. J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M. L. Reed, J. G. E. Gardeniers, W. J. P. van Enckevort, E. Vlieg, M. Elwenspoek, �Formation and Stabilisation Of Pyramidal Etching Hillocks on Silicon {100} in Anisotropic Etchants: Experimental Observations and Monte Carlo Simulation,� Journal of Applied Physics 89(7), 4113 - 4123, 2001.
• S. Tan, R. Boudreau, M. L. Reed, �Effects of Mask Misalignment and Wafer Misorientation on Silicon V-Groove Etching,� Sensors and Materials 15(2), 101 - 112, 2003.
• J. S. Lee, M. L. Reed, R. G. Kelly, �Combination of Rigorously Controlled Crevice Geometry and Computational Modeling For The Study of Crevice Corrosion Scaling Factors,� to appear in Journal of the Electrochemical Society, 2004.
• M. L. Reed, W. K. Lye, �Microsystems for Drug and Gene Delivery,� (invited), Proceedings of the IEEE 92(1), 56- 75, 2004.

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