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Michael L. Reed


Thornton Hall - E216
351 McCormick Road
PO Box 400743
Charlottesville, VA 22904-1000

Phone: (434) 924-6309
FAX: (434) 924-8818

Professor Reed's research focuses on biomedical and electronic microsystems, and the development of microfabrication technologies. Example projects include: arrays of microprobes which can pierce tissues and inject drugs and genes into cells, including both research systems and clinical devices to prevent restenosis following balloon angioplasty; arrays of microbarbs which can pierce and latch to biologic tissues, for use as mechanical connectors in surgery; three-dimensional microstructure fabrication technologies based on anodic metal oxides; advanced integrated infrared sensors; sub-100-nm pattern transfer technology; scientific studies of anisotropic silicon etching.

Dr. Reed joined the University in 1997, after holding previous positions at Hewlett-Packard Laboratories, Carnegie-Mellon University, University of Twente, and ETH Z├╝rich. He received B.S. and M.Eng. degrees from Rensselaer Polytechnic Institute, and the Ph.D. from Stanford University. He was the General Co-Chairman of the 1996 IEEE International MEMS Workshop, and is the North American Editor of the journal Sensors & Materials. He currently has 16 issued and pending patents related to microsystems technology and microfabricated medical devices. Dr. Reed is the recipient of the Hertz Prize and a Presidential Young Investigator Award, and is a Fellow of the Institute of Physics.


  • Uncooled Infrared Detector Arrays with Electrostatically Levitated Sensing Elements, Defense Advanced Research Projects Agency
  • Magnetic Proximity Microsensor Systems, Virginia Center for Innovative Technology/VisiTrak Sensors, Ltd.
  • Nanoscale Templating of Biological Molecules, National Science Foundation/Virginia Center for Innovative Technology
  • Control of Localized Epitaxy through Strain Engineering, National Science Foundation
  • Fabrication of Panoramic Segmented Detector Arrays, NASA

Most Recent Publications:

  • M. L. Reed, R. A. Rohrer, Applied Introductory Circuit Analysis for Electrical and Computer Engineers, Prentice-Hall, 1998.
  • A. J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M. L. Reed, J. G. E. Gardeniers, W. J. P. van Enckevort, E. Vlieg, M. Elwenspoek, "Formation and Stabilisation Of Pyramidal Etching Hillocks on Silicon {100} in Anisotropic Etchants: Experimental Observations and Monte Carlo Simulation," Journal of Applied Physics 89(7), 4113 - 4123, 2001.
  • S. Tan, R. Boudreau, M. L. Reed, "Effects of Mask Misalignment and Wafer Misorientation on Silicon V-Groove Etching," Sensors and Materials 15(2), 101 - 112, 2003.
  • J. S. Lee, M. L. Reed, R. G. Kelly, "Combination of Rigorously Controlled Crevice Geometry and Computational Modeling For The Study of Crevice Corrosion Scaling Factors," to appear in Journal of the Electrochemical Society, 2004.
  • M. L. Reed, W. K. Lye, "Microsystems for Drug and Gene Delivery," (invited), Proceedings of the IEEE 92(1), 56- 75, 2004.