A Collection of Images of SIS Quad-Level Resist Structures:
SEM image of a quad-level structure used to define a 0.9um SIS junction.
SEM image of a quad-level structure used to define a 0.5um SIS junction.
SEM image of a quad-level structure used to define a 0.4um SIS junction.
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Last Updated March 7th, 2003 For comments or questions, contact jcs4x@virginia.edu