A Collection of Quartz Beam Lead Images:

SEM image of a completed beam lead quartz chip

Cross-section of three trenches diced in quartz.

Close-up of the cross-section of a diced trench in quartz.

SEM image of a beam lead extending over an epoxy-filled trench.

Cross-section of trenches in a quartz chip.

SEM image of a quartz chip with Au beam-leads fabricated using vacuum planarization.

Quartz chip with thin Au beam-leads (1.8 microns) fabricated using vacuum planarization.

A close-up of 2 beam-leads of the above chip.

A shallow-angle view of the 1.8 micron beam-leads to illustrate planarization quality.

Beam lead quartz chips after gold plating.

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Last Updated March 3rd, 2003
For comments or questions, contact jcs4x@virginia.edu